Semiconductor pressure sensor

Details Semiconductor pressure sensor Semiconductor pressure sensor

2005-03-15

2005-03-15

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Fluid pressure gauge

Electrical

C073S700000, C073S777000, C438S050000

Reexamination Certificate

active

06865951

ABSTRACT:
In a diaphragm (30) having a square shape comprising four sides of a pair of first sides (31, 32) extending along the <110> crystal axis direction and a pair of second sides (33, 34) extending along the <100> crystal axis direction, when an axis bisecting each of the first sides (31, 32) of the diaphragm (30) and passing through the center point of the diaphragm is set as a first axis K1and an axis vertically-intersecting to the first axis K1and passing through the center point of the diaphragm is set as a second axis K2, each of the side gages Rs1, Rs2is located on a virtual line T1, T2, T3, T4which extends from the center point of each of the center gages Rc1, Rc2to the peripheral portion of the diaphragm (30) and intersects to the first axis K1and the second axis K2at 45°.

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patent: 6789431 (2004-09-01), Ishio

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