Test element group, method of manufacturing a test element...

Details Test element group, method of manufacturing a test element... Test element group, method of manufacturing a test element...

2005-05-03

2005-05-03

Karlsen, Ernest (Department: 2829)

Semiconductor device manufacturing: process

With measuring or testing

C438S164000

Reexamination Certificate

active

06887724

ABSTRACT:
To provide a TEG capable of early stage feedback of testing contents and a method of testing using the TEG. TFTs for TEG are manufactured on a different substrate than actual panel TFTs by using from among processes for manufacturing actual panel TFTs, processes that may easily lead to dispersion in the TFT characteristics, and the minimum number of processing steps necessary for TFT manufacture. The number of processing steps is fewer than the number for the actual panel, and therefore it is possible to complete the TFTs for TEG quicker than those of the actual panel, and it becomes possible to feed back an evaluation of the TEG TFT characteristics to the actual panel manufacturing process at an early stage. Time and costs associated with manufacture of the actual panel can therefore be suppressed.

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