Method of making a SDI electroosmotic pump using nanoporous...

Details Method of making a SDI electroosmotic pump using nanoporous... Method of making a SDI electroosmotic pump using nanoporous...

2005-03-01

2005-03-01

Niebling, John F. (Department: 2812)

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

Groove formation

C438S014000, C438S424000

Reexamination Certificate

active

06861274

ABSTRACT:
An electroosmotic pump may be fabricated using semiconductor processing techniques with a nanoporous open cell dielectric frit. Such a frit may result in an electroosmotic pump with better pumping capabilities.

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