Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate
2005-09-06
2005-09-06
Nguyen, George (Department: 3723)
Abrading
Abrading process
Glass or stone abrading
C451S052000, C451S067000, C451S286000, C451S288000, C451S398000, C451S388000
Reexamination Certificate
active
06939206
ABSTRACT:
The present invention provides a wafer carrier that includes a plurality of concentric sealing members that provide a seal, with the outer seal independently movable to allow cleaning of a peripheral backside of the wafer to occur while the wafer is still attached to the wafer carrier, and a plurality of vacuum openings that a re disposed only adjacent to an inner side of the inner seal at a location corresponding to the backside periphery of the wafer.
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International Search Report mailed Mar. 16, 2004, PCT/US03/17228.
Ashjaee Jalal
Basol Bulent M.
Talieh Homayoun
Volodarsky Konstantin
ASM Nutool, Inc.
Knobbe Martens Olson & Bear LLP
Nguyen George
LandOfFree
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