Modular stage with reaction force cancellation

Details Modular stage with reaction force cancellation Modular stage with reaction force cancellation

2005-07-12

2005-07-12

Kim, Peter B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S053000, C355S075000, C355S077000

Reexamination Certificate

active

06917412

ABSTRACT:
Methods and apparatus for providing a stage apparatus which is modular and allows for reaction force cancellation are described. According to one aspect of the present invention, a stage apparatus includes a table assembly and a first stage. The table assembly supports an object, e.g., a wafer or a reticle, which is to be moved. The first stage includes a counter mass arrangement, a plurality of carriages, and a plurality of linkages. The plurality of carriages is coupled to the table assembly through the plurality of linkages such that a first carriage and a second carriage are arranged to move in substantially opposite directions along a first axis to cause the table assembly to move along a second axis while reaction forces generated when the first carriage and the second carriage are substantially cancelled by the counter mass arrangement.

REFERENCES:
patent: 6028376 (2000-02-01), Osanai et al.
patent: 6084673 (2000-07-01), Van Den Brink et al.
patent: 6194859 (2001-02-01), Everman et al.
patent: 6396566 (2002-05-01), Ebinuma et al.
patent: 11-274273 (1999-10-01), None

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