Thin film transistor substrate and fabricating method thereof

Details Thin film transistor substrate and fabricating method thereof Thin film transistor substrate and fabricating method thereof

2005-07-26

2005-07-26

Flynn, Nathan J. (Department: 2826)

Active solid-state devices (e.g., transistors, solid-state diode

Non-single crystal, or recrystallized, semiconductor...

Amorphous semiconductor material

C257S052000, C257S057000, C349S046000

Reexamination Certificate

active

06921917

ABSTRACT:
A thin film transistor substrate and a fabricating method thereof that are capable of improving an aperture ratio. A gate electrode on that substrate has an inclined head and a concave neck.

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S.J. Hillenius, “MOSFETs and Related devices” in “Modern Semiconductor Devices”, Ed. S.M. Sze, ISBN 0-471-15237-4 (1998, John Wiley and Sons, Inc); in particular p. 164-168.

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