Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate
2005-03-29
2005-03-29
Williams, Hezron (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
C073S514230
Reexamination Certificate
active
06871544
ABSTRACT:
An accelerometer (305) for measuring seismic data. The accelerometer (305) includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer (305) also includes a top cap press frame recess (405) and a bottom cap press frame recess (420) for isolating bonding pressures to specified regions of the accelerometer (305). The accelerometer (305) is vacuum-sealed and includes a balanced metal pattern (730) to prevent degradation of the performance of the accelerometer (305). A dicing process is performed on the accelerometer (305) to isolate the electrical leads of the accelerometer (305). The accelerometer (305) further includes overshock protection bumpers (720) and patterned metal electrodes to reduce stiction during the operation of the accelerometer (305).
REFERENCES:
patent: 4922756 (1990-05-01), Henrion
patent: 4999735 (1991-03-01), Wilner
patent: 5243861 (1993-09-01), Kloeck et al.
patent: 5367429 (1994-11-01), Tsuchitani et al.
patent: 5446616 (1995-08-01), Warren
patent: 5461917 (1995-10-01), Marek et al.
patent: 5484073 (1996-01-01), Erickson
patent: 5551294 (1996-09-01), Hermann
patent: 5614742 (1997-03-01), Gessner et al.
patent: 5652384 (1997-07-01), Henrion et al.
patent: 5777226 (1998-07-01), Ip
patent: 5814727 (1998-09-01), Matsuda
patent: 5852242 (1998-12-01), Devolk et al.
patent: 5877421 (1999-03-01), Biebl et al.
patent: 5901939 (1999-05-01), Cabuz et al.
patent: 5987989 (1999-11-01), Yamamoto et al.
patent: 6035714 (2000-03-01), Yazdi et al.
patent: 4032828 (1991-04-01), None
patent: 4132232 (1993-04-01), None
patent: 4222472 (1994-01-01), None
patent: 0849578 (1998-06-01), None
patent: WO9916129 (1999-04-01), None
Fung Bing-Fai
Goldberg Howard D.
Ip Matthew
Marsh James L.
Schmidt Martin A.
Input / Output Inc.
Madan Mossman & Sriram P.C.
Saint-Surin Jacques M.
Williams Hezron
LandOfFree
Sensor design and process does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Sensor design and process, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Sensor design and process will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3392020