Semiconductor device identification apparatus

Details Semiconductor device identification apparatus Semiconductor device identification apparatus

2005-03-15

2005-03-15

Le, Thien M (Department: 2876)

Registers

Records

Fluorescent, phosphorescent, radiation emitting

C235S492000, C235S454000

Reexamination Certificate

active

06866200

ABSTRACT:
A three-dimensional image of a semiconductor device identification pattern is obtained by measuring the distance of at least one sensor to the surface of the semiconductor device. The apparatus includes a source of radiation for deriving the distance from properties of the reflected light. A unit for determining the distance and an image processing unit are used to establish the three-dimensional picture. Positional information can be achieved in a scanning movement from motors being controlled by a control unit. By applying a threshold value, a two-dimensional image is derived and by a pattern recognition algorithm, the identification pattern can be analyzed.

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