Non- contacting capacitive diagnostic device

Details Non- contacting capacitive diagnostic device Non- contacting capacitive diagnostic device

2005-07-12

2005-07-12

Tang, Minh N. (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S754120

Reexamination Certificate

active

06917209

ABSTRACT:
A non-contacting capacitive diagnostic device includes a pulsed light source for producing an electric field in a semiconductor or photovoltaic device or material to be evaluated and a circuit responsive to the electric field. The circuit is not in physical contact with the device or material being evaluated and produces an electrical signal characteristic of the electric field produced in the device or material. The diagnostic device permits quality control and evaluation of semiconductor or photovoltaic device properties in continuous manufacturing processes.

REFERENCES:
patent: 4912052 (1990-03-01), Miyoshi et al.
patent: 4967152 (1990-10-01), Patterson
patent: 5087876 (1992-02-01), Reiss et al.
patent: 6072320 (2000-06-01), Verkuil
patent: 6184696 (2001-02-01), White et al.

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