Method of forming a capacitor

Details Method of forming a capacitor Method of forming a capacitor

2005-07-19

2005-07-19

Trinh, Michael (Department: 2822)

Semiconductor device manufacturing: process

Making passive device

Stacked capacitor

C438S255000, C438S296000

Reexamination Certificate

active

06919257

ABSTRACT:
A method of forming a capacitor is disclosed. The method includes forming a first electrode having a non-smooth surface and selected from the group consisting of transition metals, conductive oxides, alloys thereof, and combinations thereof. The method further includes forming a second electrode, and forming a dielectric between the first and second electrodes.

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