Batteries: thermoelectric and photoelectric – Photoelectric – Cells
Patent
1996-09-06
1998-08-25
Nguyen, Nam
Batteries: thermoelectric and photoelectric
Photoelectric
Cells
438 97, H01L 310368
Patent
active
057979995
ABSTRACT:
In a method for fabricating a solar cell, an amorphous silicon film of a first conductivity type is formed on a substrate, and nickel silicide is formed thereon. The amorphous silicon film is crystallized through heat treatment to obtain a crystalline silicon film of the first conductivity type. Residual nickel silicide on the surface of the crystalline silicon film of the first conductivity type is removed. Another crystalline silicon film of a second conductivity type is further formed on the surface of the crystalline silicon film of the first conductivity type.
REFERENCES:
patent: 5456763 (1995-10-01), Kaschmitter et al.
patent: 5470619 (1995-11-01), Ahn et al.
patent: 5484746 (1996-01-01), Ichikawa et al.
patent: 5486237 (1996-01-01), Sano et al.
patent: 5492142 (1996-02-01), Sano
Arai Yasuyuki
Sannomiya Hitoshi
Tomita Takashi
Yamazaki Shunpei
Conlin David G.
Neuner George W.
Nguyen Nam
Sharp Kabushiki Kaisha
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