POLY-O-HYDROXYAMIDES, POLYBENZOXAZOLES, PROCESSES FOR...

Details POLY-O-HYDROXYAMIDES, POLYBENZOXAZOLES, PROCESSES FOR... POLY-O-HYDROXYAMIDES, POLYBENZOXAZOLES, PROCESSES FOR...

2005-05-31

2005-05-31

Hightower, P. Hampton (Department: 1711)

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

From carboxylic acid or derivative thereof

C528S183000, C528S184000, C528S272000, C528S332000, C528S347000, C528S348000, C528S363000, C528S364000, C528S367000, C528S373000, C525S420000, C525S434000

Reexamination Certificate

active

06900284

ABSTRACT:
Poly-o-hydroxyamides are cyclicized to obtain polybenzoxazoles. The poly-o-hydroxyamides provide effective filling of trenches. In particular, the poly-o-hydroxyamides can fill trenches having a width of less than 100 nm and an aspect ratio of more than 4. Further, the polybenzoxazoles of the invention are very suitable for the damascene process. A dielectric can be made from the polybenzoxazole. In turn, semiconductor devices can include the dieletric. Processes for making the poly-o-hydroxyamides, polybenzoxazoles, and semiconductor devices are included.

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patent: 100 11 608 (2001-10-01), None
patent: WO 97/10193 (1997-03-01), None

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