Surface acoustic wave device

Details Surface acoustic wave device Surface acoustic wave device

2005-09-06

2005-09-06

Dougherty, Thomas M. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S31300R

Reexamination Certificate

active

06940208

ABSTRACT:
A surface acoustic wave device includes a ZnO dielectric thin film on a quartz substrate and an IDT electrode having strips between the ZnO thin film and the quartz substrate. The IDT electrode has at least one region where the strips are disposed at an interval defined by approximately a half-wavelength of the surface acoustic wave. The duty ratio of the IDT electrode is preferably more than about 0.5. Alternatively, a protrusion is formed via a slope in the region of the ZnO thin film where the IDT electrode is disposed, and the inclination angle θ of the slope is more than about 30°.

REFERENCES:
patent: 3886504 (1975-05-01), Hartmann et al.
patent: 3952268 (1976-04-01), Schulz et al.
patent: 5061870 (1991-10-01), Ieki et al.
patent: 5888646 (1999-03-01), Takahashi et al.
patent: 6072263 (2000-06-01), Toda
patent: 6291923 (2001-09-01), Kadota
patent: 6426584 (2002-07-01), Yoshida et al.
patent: 6429569 (2002-08-01), Kadota
patent: 6498548 (2002-12-01), Kaneda et al.
patent: 6534896 (2003-03-01), Jian et al.
patent: 6577210 (2003-06-01), Tsutsumi et al.
patent: 6603371 (2003-08-01), Nakao et al.
patent: 6674215 (2004-01-01), Yoshida et al.
patent: 6677696 (2004-01-01), Ruile
patent: 6710509 (2004-03-01), Kadota
patent: 6713940 (2004-03-01), Takamine
patent: 6768397 (2004-07-01), Takamine
patent: 2002/0017969 (2002-02-01), Takamine
patent: 2002/0063612 (2002-05-01), Takamine
patent: 0 734 120 (1996-09-01), None
patent: 1 255 694 (2002-07-01), None
patent: 2 333 196 (1999-07-01), None
patent: 2-250414 (1990-10-01), None
patent: 2-250415 (1990-10-01), None
patent: 2-250416 (1990-10-01), None
patent: 02-260908 (1990-10-01), None
patent: 02-305011 (1990-12-01), None
patent: 4-77012 (1992-03-01), None
patent: 06-268469 (1994-09-01), None
patent: 08-265088 (1996-10-01), None
patent: WO 01/28090 (2001-04-01), None
Michio Kadota, “Research for Mass Production of Surface Acoustic Wave Filters for TV and VTR using Zinc Oxide Piezoelectric Films”, pp. 83-90. Murata Manufacturing Co., Ltd.
Yahei Koyamada et al., “Analysis of SAW Resonators Using Long IDT's and Their Applications”, '77/9 vol. J 60-A No. 9, pp. 805-812.
Hashimoto, “Introduction to Surface Acoustic Wave Device Simulation”, Realize Corp., pp. 232-235.
Michio Kadota et al., “Reduction of Deviation of Frequency Characteristics of SAW Filters by Mechanical Polishing of ZnO Film Surface”, A vol. J76-A No. 10, pp. 1339-1406, Oct. 1993.
Seiichi Mitobe et al., “Finite-Element Analysis of Periodically Perturbed Piezoelectric Waveguides”, '85/1 vol. J68-C No. 1, pp. 21-27.

Affiliated with

Also associated with

Rating

Surface acoustic wave device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Surface acoustic wave device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Surface acoustic wave device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3386405