Processing system and processing method

Details Processing system and processing method Processing system and processing method

2005-05-03

2005-05-03

Gandhi, Jayprakash N. (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S121000, C700S228000

Reexamination Certificate

active

06889108

ABSTRACT:
The present invention is to provide a processing system and a processing method which do not require the selection of processing recipes by operators and can provide high throughputs.The processing system for processing an object group of one object-to-be-processed, or two or more objects-to-be-processed in a processing vessel with a processing liquid, comprises a plurality of processing vessel groups M1, M2, M3each of at least one or more processing vessels, which can perform the same processing; transportation apparatus22for transporting object groups WS to the plurality of processing vessel groups; and a control unit45for selecting the processing vessel groups M1, M2, M3for the object groups WS to be transported to, the control unit45having an applying function of applying processing recipes for the respective object groups and a selecting function of selecting the processing vessel groups for executing the respective applied processing recipes in a prescribed sequence.

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