Method for producing an antifuse in a substrate and an...

Semiconductor device manufacturing: process – Making device array and selectively interconnecting – Using structure alterable to conductive state

Reexamination Certificate

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C438S467000, C438S600000, C257S050000, C257S530000

Reexamination Certificate

active

06919234

ABSTRACT:
Method for producing an antifuse in a substrate, a first interconnect being applied to the substrate, a dielectric layer being applied at an end face of the first interconnect, which end face essentially runs vertically with respect to the substrate, a second interconnect being applied in such a way that it adjoins the dielectric layer with an end face, with the result that an antifuse structure is formed.

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patent: 5395797 (1995-03-01), Chen et al.
patent: 5852323 (1998-12-01), Conn
patent: 5970372 (1999-10-01), Hart et al.
patent: 6509624 (2003-01-01), Radens et al.
patent: 6534841 (2003-03-01), Van Brocklin et al.
patent: 6740957 (2004-05-01), Porter
patent: 6844609 (2005-01-01), Motsiff et al.
patent: 6861727 (2005-03-01), Forbes et al.
patent: 500 034 (1992-08-01), None
patent: 5-121557 (1993-05-01), None
German Examination Report dated Jun. 27, 2003.

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