Microgyroscope tunable for translational acceleration

Details Microgyroscope tunable for translational acceleration Microgyroscope tunable for translational acceleration

2005-03-01

2005-03-01

Chapman, John E. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C073S504140

Reexamination Certificate

active

06860150

ABSTRACT:
A microgyroscope tunable against an external translational acceleration includes an oscillating mass floating over a wafer to oscillate in a first direction, a driving electrode for oscillating the oscillating mass, a sensing mass oscillating together with the oscillating mass and concurrently moving in a second direction, wherein the second direction is perpendicular to the first direction, a sensing electrode for sensing a motion of the sensing mass, and a sensing electrode supporting portion for movably securing the sensing electrode so that the sensing electrode can move in the second direction with the sensing mass. A microgyroscope according to the present invention is able to prevent sensing signals due to an external disturbance, such as noise or impulse.

REFERENCES:
patent: 5408877 (1995-04-01), Greiff et al.
patent: 6301963 (2001-10-01), Park

Affiliated with

Also associated with

Rating

Microgyroscope tunable for translational acceleration does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Microgyroscope tunable for translational acceleration, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Microgyroscope tunable for translational acceleration will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3381266