Micromechanical structure, in particular for an acceleration...

Details Micromechanical structure, in particular for an acceleration... Micromechanical structure, in particular for an acceleration...

2005-09-06

2005-09-06

Dang, Hung Xuan (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C073S488000

Reexamination Certificate

active

06940632

ABSTRACT:
A micromechanical structure, particularly for an acceleration sensor, includes a substrate, which has an anchoring device, and a centrifugal mass, which is connected to the anchoring device via a flexible spring device, so that the centrifugal mass is elastically deflectable from its rest position. The centrifugal mass has an oblong convex form and is essentially rotationally symmetric in relation to the longitudinal axis. The centrifugal mass optionally has a widening at both longitudinal ends, to which the flexible spring device is attached.

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