Forming film bulk acoustic resonator filters

Details Forming film bulk acoustic resonator filters Forming film bulk acoustic resonator filters

2005-09-06

2005-09-06

Tokar, Michael (Department: 2819)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S186000, C310S322000, C310S349000

Reexamination Certificate

active

06940367

ABSTRACT:
A film bulk acoustic resonator may be formed with a piezoelectric film having improved quality. The piezoelectric film may be deposited directly onto a single crystal silicon substrate. That substrate may be removed and selectively replaced with a lower electrode to form the film bulk acoustic resonator.

REFERENCES:
patent: 5884378 (1999-03-01), Dydyk
patent: 6349454 (2002-02-01), Manfra et al.
patent: 6441539 (2002-08-01), Kitamura et al.
patent: 6566979 (2003-05-01), Larson et al.
patent: 6662419 (2003-12-01), Wang et al.
patent: 6734763 (2004-05-01), Nishihara et al.
patent: 6828713 (2004-12-01), Bradley et al.

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