Radiation imagery chemistry: process – composition – or product th – Registration or layout process other than color proofing
Reexamination Certificate
2005-07-12
2005-07-12
Young, Christopher G. (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Registration or layout process other than color proofing
C430S030000, C430S322000
Reexamination Certificate
active
06916585
ABSTRACT:
A method of determining and correcting alignment during imprint lithography process is described. During an imprint lithographic process the template may be aligned with the substrate by the use of alignment marks disposed on both the template and substrate. The alignment may be determined and corrected for before the layer is processed.
REFERENCES:
patent: 3783520 (1974-01-01), King
patent: 4070116 (1978-01-01), Frosch et al.
patent: 4119688 (1978-10-01), Hiraoka
patent: 4201800 (1980-05-01), Alcorn et al.
patent: 4256829 (1981-03-01), Daniel
patent: 4326805 (1982-04-01), Feldman et al.
patent: 4426247 (1984-01-01), Tamamura et al.
patent: 4507331 (1985-03-01), Hiraoka
patent: 4552833 (1985-11-01), Ito et al.
patent: 4600309 (1986-07-01), Fay
patent: 4657845 (1987-04-01), Frechet et al.
patent: 4692205 (1987-09-01), Sachdev et al.
patent: 4707218 (1987-11-01), Giammarco et al.
patent: 4724222 (1988-02-01), Feldman
patent: 4737425 (1988-04-01), Lin et al.
patent: 4808511 (1989-02-01), Holmes
patent: 4826943 (1989-05-01), Ito et al.
patent: 4848911 (1989-07-01), Uchida et al.
patent: 4857477 (1989-08-01), Kanamori
patent: 4891303 (1990-01-01), Garza et al.
patent: 4908298 (1990-03-01), Hefferon et al.
patent: 4919748 (1990-04-01), Bredbenner et al.
patent: 4921778 (1990-05-01), Thackeray et al.
patent: 4931351 (1990-06-01), McColgin et al.
patent: 4964945 (1990-10-01), Calhoun
patent: 4976818 (1990-12-01), Hashimoto et al.
patent: 4980316 (1990-12-01), Huebner
patent: 4999280 (1991-03-01), Hiraoka
patent: 5053318 (1991-10-01), Gulla et al.
patent: 5071694 (1991-12-01), Uekita et al.
patent: 5074667 (1991-12-01), Miyatake
patent: 5108875 (1992-04-01), Thackeray et al.
patent: 5148036 (1992-09-01), Matsugu et al.
patent: 5148037 (1992-09-01), Suda et al.
patent: 5151754 (1992-09-01), Ishibashi et al.
patent: 5169494 (1992-12-01), Hashimoto et al.
patent: 5173393 (1992-12-01), Sezi et al.
patent: 5179863 (1993-01-01), Uchida et al.
patent: 5198326 (1993-03-01), Hashimoto et al.
patent: 5206983 (1993-05-01), Guckel et al.
patent: 5212147 (1993-05-01), Sheats
patent: 5234793 (1993-08-01), Sebald et al.
patent: 5240878 (1993-08-01), Fitzsimmons et al.
patent: 5242711 (1993-09-01), DeNatale et al.
patent: 5244818 (1993-09-01), Jokerst et al.
patent: 5314772 (1994-05-01), Kozicki et al.
patent: 5318870 (1994-06-01), Hartney
patent: 5324683 (1994-06-01), Fitch et al.
patent: 5328810 (1994-07-01), Lowrey et al.
patent: 5330881 (1994-07-01), Sidman et al.
patent: 5362606 (1994-11-01), Hartney et al.
patent: 5366851 (1994-11-01), Novembre
patent: 5374454 (1994-12-01), Bickford et al.
patent: 5376810 (1994-12-01), Hoenk et al.
patent: 5380474 (1995-01-01), Rye et al.
patent: 5414514 (1995-05-01), Smith et al.
patent: 5417802 (1995-05-01), Obeng
patent: 5421981 (1995-06-01), Leader et al.
patent: 5422295 (1995-06-01), Choi et al.
patent: 5424549 (1995-06-01), Feldman
patent: 5425848 (1995-06-01), Haisma et al.
patent: 5431777 (1995-07-01), Austin et al.
patent: 5439766 (1995-08-01), Day et al.
patent: 5453157 (1995-09-01), Jeng
patent: 5458520 (1995-10-01), DeMercurio et al.
patent: 5468542 (1995-11-01), Crouch
patent: 5527662 (1996-06-01), Hashimoto et al.
patent: 5654238 (1997-08-01), Cronin et al.
patent: 5669303 (1997-09-01), Maracas et al.
patent: 5670415 (1997-09-01), Rust
patent: 5700626 (1997-12-01), Lee et al.
patent: 5725788 (1998-03-01), Maracas et al.
patent: 5736424 (1998-04-01), Prybyla et al.
patent: 5737064 (1998-04-01), Inoue et al.
patent: 5743713 (1998-04-01), Hattori et al.
patent: 5743998 (1998-04-01), Park
patent: 5802914 (1998-09-01), Fassler et al.
patent: 5804474 (1998-09-01), Sakaki et al.
patent: 5808742 (1998-09-01), Everett et al.
patent: 5855686 (1999-01-01), Rust
patent: 5884292 (1999-03-01), Baker et al.
patent: 5895263 (1999-04-01), Carter et al.
patent: 5907782 (1999-05-01), Wu
patent: 5926690 (1999-07-01), Toprac et al.
patent: 5948219 (1999-09-01), Rohner
patent: 5948570 (1999-09-01), Kornblit et al.
patent: 6033977 (2000-03-01), Gutsche et al.
patent: 6035805 (2000-03-01), Rust
patent: 6088103 (2000-07-01), Everett et al.
patent: 6096655 (2000-08-01), Lee et al.
patent: 6150231 (2000-11-01), Muller et al.
patent: 6150680 (2000-11-01), Eastman et al.
patent: 6245581 (2001-06-01), Bonser et al.
patent: 6274294 (2001-08-01), Hines
patent: 6309580 (2001-10-01), Chou
patent: 6326627 (2001-12-01), Putvinski et al.
patent: 6329256 (2001-12-01), Ibok
patent: 6361831 (2002-03-01), Sato et al.
patent: 6383928 (2002-05-01), Eissa
patent: 6387783 (2002-05-01), Furukawa et al.
patent: 6388253 (2002-05-01), Su
patent: 6391798 (2002-05-01), DeFelice et al.
patent: 6423207 (2002-07-01), Heidari et al.
patent: 6455411 (2002-09-01), Jiang et al.
patent: 6482742 (2002-11-01), Chou
patent: 6489068 (2002-12-01), Kye
patent: 6514672 (2003-02-01), Tsai et al.
patent: 6517977 (2003-02-01), Resnick et al.
patent: 6522411 (2003-02-01), Moon et al.
patent: 6534418 (2003-03-01), Plat et al.
patent: 6541360 (2003-04-01), Plat et al.
patent: 6561706 (2003-05-01), Singh et al.
patent: 6565928 (2003-05-01), Sakamoto et al.
patent: 6632742 (2003-10-01), Yang et al.
patent: 6635581 (2003-10-01), Wong
patent: 6646662 (2003-11-01), Nebashi et al.
patent: 6676983 (2004-01-01), Malfait
patent: 6677252 (2004-01-01), Marsh
patent: 6703190 (2004-03-01), Elian et al.
patent: 6713238 (2004-03-01), Chou et al.
patent: 6716767 (2004-04-01), Shih et al.
patent: 6719915 (2004-04-01), Willson et al.
patent: 6730256 (2004-05-01), Bloomstein et al.
patent: 6737202 (2004-05-01), Gehoski et al.
patent: 6770852 (2004-08-01), Steger
patent: 6776094 (2004-08-01), Whitesides et al.
patent: 6777170 (2004-08-01), Bloomstein et al.
patent: 6790763 (2004-09-01), Kondo et al.
patent: 6842229 (2005-01-01), Sreenivasan et al.
patent: 2002/0094496 (2002-07-01), Choi et al.
patent: 2002/0098426 (2002-07-01), Sreenivasan et al.
patent: 2002/0132482 (2002-09-01), Chou
patent: 2002/0150398 (2002-10-01), Choi et al.
patent: 2002/0167117 (2002-11-01), Chou
patent: 2003/0080471 (2003-05-01), Chou
patent: 2003/0081193 (2003-05-01), White et al.
patent: 2003/0011368 (2003-06-01), Mancini et al.
patent: 2003/0129542 (2003-07-01), Shih et al.
patent: 2003/0179354 (2003-09-01), Araki et al.
patent: 2003/0205657 (2003-11-01), Voisin
patent: 2003/0215577 (2003-11-01), Willson et al.
patent: 2004/0007799 (2004-01-01), Choi et al.
patent: 2004/0008334 (2004-01-01), Sreenivasan et al.
patent: 2004/0010341 (2004-01-01), Watts et al.
patent: 2004/0021866 (2004-01-01), Watts et al.
patent: 2004/0021254 (2004-02-01), Sreenivasan et al.
patent: 2004/0022888 (2004-02-01), Sreenivasan et al.
patent: 2004/0029041 (2004-02-01), Shih et al.
patent: 2004/0036201 (2004-02-01), Chou et al.
patent: 2004/0086793 (2004-05-01), Sreenivasan et al.
patent: 2004/0089979 (2004-05-01), Rubin
patent: 2004/0090611 (2004-05-01), Choi et al.
patent: 2004/0104841 (2004-06-01), Choi et al.
patent: 2004/0112861 (2004-06-01), Choi et al.
patent: 2004/0141163 (2004-07-01), Bailey et al.
patent: 2004/0149687 (2004-08-01), Choi et al.
patent: 2004/0183563 (2004-08-01), Bailey et al.
patent: 2004/0168586 (2004-09-01), Bailey et al.
patent: 2004/0170771 (2004-09-01), Bailey et al.
patent: 2004/0200411 (2004-10-01), Willson et al.
patent: 2004/0223131 (2004-11-01), Choi et al.
patent: 55-88332 (1978-12-01), None
patent: 57-7931 (1980-06-01), None
patent: 66-13870 (1986-12-01), None
patent: 02-24848 (1990-01-01), None
patent: 02-92603 (1990-04-01), None
patent: WO 00/21689 (2000-04-01), None
patent: WO 01/47003 (2001-06-01), None
patent: WO 01/63361 (2001-08-01), None
patent: WO 01/69317 (2001-09-01), None
patent: WO 01/79591 (2001-10-01), None
patent: WO 01/79592 (2001-10-01), None
patent: WO 01/79933 (2001-10-01), None
patent: WO 01/90816 (2001-11-01), None
White et al., Novel Alignment System for Imprint Lithography, J. Vac. Sci. Technol. B 18 (6), Nov./Dec. 2000, pp. 3552-3556.
Sreenivasan et al., “An Imprint Lithography System to Produce a Light to Impinge Upon and Polymerize a Liquid in Superimposition with Template Overlay Marks,” U.S. Appl. No. 10/
Bailey Todd
Choi Byung J.
Colburn Matthew
Sreenivasan Sidlgata V.
Board of Regents The University of Texas Systems
Brooks Kenneth C.
Young Christopher G.
LandOfFree
Method of varying template dimensions to achieve alignment... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method of varying template dimensions to achieve alignment..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of varying template dimensions to achieve alignment... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3378061