Electric resistance heating devices – Heating devices – Vaporizer
Reexamination Certificate
2005-04-26
2005-04-26
Paik, Sang Y. (Department: 3742)
Electric resistance heating devices
Heating devices
Vaporizer
C392S485000
Reexamination Certificate
active
06885812
ABSTRACT:
A system for heating a flow path including at least a solid or vapor source vessel connected by a conduit to a valve. The system includes at least one tubular adapter of heat conductive material for receipt along at least a portion of the flow path. The adapter has inner dimensions substantially corresponding to outer dimensions of the portion of the flow path and an outer dimension which is substantially constant along a length of the adapter. The system also includes at least one tubular heater apparatus received over the adapter and having an inner dimension that is substantially constant along a length of the heater apparatus and substantial corresponds to the outer dimension of the adapter.
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McDermott Will & Emery LLP
MKS Instruments Inc.
Paik Sang Y.
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