Polishing compositions comprising polymeric cores having...

Details Polishing compositions comprising polymeric cores having... Polishing compositions comprising polymeric cores having...

2005-07-19

2005-07-19

Nguyen, Dung Van (Department: 3723)

Abrading

Abrading process

Glass or stone abrading

C451S060000

Reexamination Certificate

active

06918820

ABSTRACT:
This invention relates generally to compositions and methods for removing adherent materials and polishing surfaces. In one embodiment, the method employs an improved media comprising core-shell particles. The media can be applied to microelectronic objects of manufacture.

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