Sputtering targets formed from cast materials

Details Sputtering targets formed from cast materials Sputtering targets formed from cast materials

2005-04-12

2005-04-12

King, Roy (Department: 1742)

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

C148S714000

Reexamination Certificate

active

06878250

ABSTRACT:
Described is a high quality sputtering target and method of manufacture which involves application of equal channel angular extrusion.

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