Sensor device for non-intrusive diagnosis of a semiconductor...

Details Sensor device for non-intrusive diagnosis of a semiconductor... Sensor device for non-intrusive diagnosis of a semiconductor...

2005-05-24

2005-05-24

Noland, Thomas P. (Department: 2856)

Measuring and testing

Testing of apparatus

C340S870160, C414S148000, C414S935000, C356S614000

Reexamination Certificate

active

06895831

ABSTRACT:
A sensor device, for diagnosing a processing system, generally includes a support platform and one or more sensors mounted on the support platform. The sensor senses a condition, such as direction or inclination or acceleration in one or two axes, of the sensor device and outputs a signal indicative thereof, which is then sent to a transmitter, also mounted to the support platform, for wireless transmission of the signal to a receiver mounted on or near the processing system. The support platform generally has physical characteristics, such as size, profile height, mass, flexibility and/or strength, substantially similar to those of the substrates that are to be processed in the processing system, so the sensor device can be transferred through the processing system in a manner similar to the manner in which production substrates are transferred through the processing system.

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