Angular velocity sensor

Details Angular velocity sensor Angular velocity sensor

2005-03-15

2005-03-15

Kwok, Helen (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C310S360000

Reexamination Certificate

active

06865945

ABSTRACT:
An angular velocity sensor, which is able to reduce the variations of driving resonance frequency of the vibrator and to improve the reliability of the sensitivity of detection signal with respect to the angular velocity applied, is provided. The angular velocity sensor comprises a vibrator, and a tuning-fork as the vibrator is formed of a silicone substrate with crystal orientation (100) as its main face, and a side face nearly perpendicular to the driving direction (X direction) of the arm of the tuning-fork corresponds to a crystal orientation where the elastic modulus is less dependent on azimuth angle.

REFERENCES:
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K. Maenaka et al., “Analysis of a highly sensitive silicone gyroscope with cantilever beam as vibrating mass”, Sensors and Actuators A 54, 1996, pp. 568-573, Fig. 10.
H. Chen et al., “A Piezoresistive Accelerometer with a Novel Vertical Beam Structure”, Transducers '97, 1997, pp. 1201-1204, Fig. 2.

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