Method of fabricating surface micromachined structures

Details Method of fabricating surface micromachined structures Method of fabricating surface micromachined structures

1991-05-16

1992-07-14

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437228, 437238, 437241, 437927, 156657, 148DIG164, H01L 21302

Patent

active

051302764

ABSTRACT:
A method of fabricating a surface micromachined structure is comprised of the steps of providing a semiconductor substrate having a dynamic element partially supported above the semiconductor substrate by a release layer and having a metal contact layer disposed on the dynamic element, forming a protection layer over the metal contact layer, and removing the release layer and the protection layer with an etchant that etches the protection layer at a slower rate than the release layer.

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"Process Integration for Active Polysilicon Resonant Microstructures", Putty et al., Sensors and Actuators, 20 (1989), pp. 143-151.
"Investigations on Free-Standing Polysilicon Beams in View of Their Application as Transducers", Linder et al., Sensors and Actuators, A21-A23 (1990), pp. 1053-1059.

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