Environmental heating and cooling; fluid handling and sanitary e – Heating or cooling
Design Patent
2002-11-21
2004-08-03
Vinson, Brian N. (Department: 2911)
Environmental heating and cooling; fluid handling and sanitary e
Heating or cooling
Design Patent
active
D0493873
CLAIM:
I claim the ornamental design for heating gas supplier for semiconductor manufacturing equipment, as shown and described.
REFERENCES:
patent: 6277201 (2001-08-01), Nishikawa
patent: 6412501 (2002-07-01), Onoda et al.
patent: 6635307 (2003-10-01), Huang et al.
Ladas & Parry
Tokyo Electron Limited
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