Laser interferometer having a sheath for the laser beam

Details Laser interferometer having a sheath for the laser beam Laser interferometer having a sheath for the laser beam

1996-07-29

1998-01-13

Font, Frank G.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356363, G01B 902

Patent

active

057085056

ABSTRACT:
An interferometer used to measure distance to an object is provided with a laser sheath. The sheath encloses a substantial part of the measurement beam's path to provide a controlled environment which reduces environmental influences on the measured distance. The sheath is of variable length and responsive to a follower so as to maintain a sheath end nearest the object at a small distance from the object. An environmental controller controls the environment within the sheath. The environment within the sheath can be a vacuum or a suitable gas or gas mixture. A corrector can be used to compensate the interferometer's measured-distance signal for detected environmental characteristics to produce a corrected signal which indicates distance between the interferometer and the reflective surface. The apparatus and methods can be used to measure and control stage position in a projection-type wafer exposure system which is affected by variations in its atmospheric environment.

REFERENCES:
patent: 4278352 (1981-07-01), Keller
patent: 4643577 (1987-02-01), Roth et al.
patent: 4766309 (1988-08-01), Kudo
patent: 4814625 (1989-03-01), Yabu
patent: 4969736 (1990-11-01), Slotwinski
patent: 5141318 (1992-08-01), Miyazaki et al.
patent: 5146284 (1992-09-01), Tabarelli et al.
R. Donaldson et al., "Design and Construction of a Large, Vertical Axis Diamond Turning Machine", SPIE -- International Society for Optical Engineering, vol. 433, Aug. 24-26, 1983, pp. 62-67.
B. Krauskopf, "Diamond Turning: Reflecting Demands for Precision", Manufacturing Engineering, vol. 92, No. 5, May 1984, pp. 90-100.
Niikon Technical Report, Step-and-Repeat Exposure System, NSR Series General Information, 1989/1990 Nikon Corporation Brochure (no month available).
J.B. Bryan et al., "Design of a new error-corrected co-ordinate measuring machine", Precision Engineering, vol. 1 (1979) pp. 125-128 (no month available).
J.B. Bryan, "Design and Construction of an Ultraprecision 84 inch Diamond Turning Machine", Precision Engineering, vol. 1 (1979) pp. 13-17 (no month available).
J.H. Bruning, "Optical imaging for microfabrication", J. Vac. Sci. Technology, 17(5), Sep./Oct. 1980, pp. 1147-1155.

Affiliated with

Also associated with

Rating

Laser interferometer having a sheath for the laser beam does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Laser interferometer having a sheath for the laser beam, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Laser interferometer having a sheath for the laser beam will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-330621