Inner wall shield for a process chamber for manufacturing...

Machines not elsewhere specified – Heat treatment – welding or brazing

Design Patent

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Design Patent

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D0491963

CLAIM:
I claim the ornamental design for inner wall shield for a process chamber for manufacturing semiconductors, as shown and described.

REFERENCES:
patent: 6432203 (2002-08-01), Black et al.
patent: 6630201 (2003-10-01), Chiang et al.

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