Measuring element for a mass air flow sensor and mass air flow s

Details Measuring element for a mass air flow sensor and mass air flow s Measuring element for a mass air flow sensor and mass air flow s

1996-05-17

1998-01-13

Chilcot, Richard

Measuring and testing

Volume or rate of flow

Thermal type

G01F 168

Patent

active

057082057

ABSTRACT:
A measuring element for a mass air flow sensor formed on a substrate for measuring a flow rate of an objective fluid comprises a pair of heated resistors of thin films juxtaposed in the flowing direction of the objective fluid, formed at a thin film heated resistor forming part on the substrate, a pair of non-heated ambient temperature sensing resistors of thin films, formed at a thin film ambient temperature sensing resistor forming part on the substrate, and a plurality of electrode terminals of thin films formed at a supporting part at which the substrate is supported, being a part excluding the heated resistor thin film forming part and the thin film ambient temperature sensing resistor forming part, for taking out electrical signals from the heated resisters and the non-heated ambient temperature sensing resistors, wherein the thin film heated resistor forming part and the thin film ambient temperature sensing resistor forming part are shifted each other and arranged before and after in the flowing direction of the fluid, and shifted and arranged left and right in the direction perpendicular to the flowing direction so that the pair of the heated resistors and the pair of the non-heated do not superimpose each other in the viewing direction parallel to the flowing direction, and the supporting part is allocated at one end side of the substrate, at which the plurality of electrode terminals of thin films are formed.

REFERENCES:
patent: 5231878 (1993-08-01), Zanini-Fisher et al.
patent: 5271272 (1993-12-01), Hueftle et al.
patent: 5372040 (1994-12-01), Hecht et al.
patent: 5375466 (1994-12-01), Konzelmann

Affiliated with

Also associated with

Rating

Measuring element for a mass air flow sensor and mass air flow s does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Measuring element for a mass air flow sensor and mass air flow s, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Measuring element for a mass air flow sensor and mass air flow s will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-328348