Micro-electromechanical assembly that incorporates a...

Incremental printing of symbolic information – Ink jet – Ejector mechanism

Reexamination Certificate

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Reexamination Certificate

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06824251

ABSTRACT:

STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT
Not Applicable
FIELD OF THE INVENTION
This invention relates to a micro-electromechanical assembly. More particularly, this invention relates to a micro-electromechanical assembly which incorporates a covering formation for a micro-electromechanical device.
REFERENCED PATENT APPLICATIONS
The following patents/patent applications are incorporated by reference.
6,227,652
6,213,588
6,213,589
6,231,163
6,247,795
09/113,099
6,244,691
6,257,704
09/112,778
6,220,694
6,257,705
6,247,794
6,234,610
6,247,793
6,264,306
6,241,342
6,247,792
6,264,307
6,254,220
6,234,611
09/112,808
09/112,809
6,239,821
09/113,083
6,247,796
09/113,122
09/112,793
09/112,794
09/113,128
09/113,127
6,227,653
6,234,609
6,238,040
6,188,415
6,227,654
6,209,989
6,247,791
09/112,764
6,217,153
09/112,767
6,243,113
09/112,807
6,247,790
6,260,953
6,267,469
09/425,419
09/425,418
09/425,194
09/425,193
09/422,892
09/422,806
09/425,420
09/422,893
09/693,703
09/693,706
09/693,313
09/693,279
09/693,727
09/693,708
09/575,141
09/113,053
09/855,094
09/854,762
09/854,715
09/854,830
09/854,714
09/854,703
09/855,093
09/854,815
09/854,825
09/864,377
09/864,380
09/900,178
09/864,379
09/864,378
09/864,334
09/864,332
09/864,343
09/864,342
09/866,786
09/874,757
09/900,174
09/900,160
09/900,175
09/900,177
09/900,159
09/900,176
09/922,274
09/922,275
09/922,158
09/922,159
09/922,036
09/922,047
09/922,029
09/922,207
09/922,112
09/922,105
09/942,549
09/942,605
09/942,548
09/942,603
09/942,604
BACKGROUND OF THE INVENTION
As set out in the above referenced applications/patents, the Applicant has spent a substantial amount of time and effort in developing printheads that incorporate micro electromechanical system (MEMS)—based components to achieve the ejection of ink necessary for printing.
As a result of the Applicant's research and development, the Applicant has been able to develop printheads having one or more printhead chips that together incorporate up to 84 000 nozzle arrangements. The Applicant has also developed suitable processor technology that is capable of controlling operation of such printheads. In particular, the processor technology and the printheads are capable of cooperating to generate resolutions of 1600 dpi and higher in some cases. Examples of suitable processor technology are provided in the above referenced patent applications/patents.
The Applicant has overcome substantial difficulties in achieving the necessary ink flow and ink drop separation within the ink jet printheads. A number of printhead chips that the Applicant has developed incorporate nozzle arrangements that each have a nozzle chamber with an ink ejection member positioned in the nozzle chamber. The ink ejection member is then displaceable within the nozzle chamber to eject ink from the nozzle chamber.
A particular difficulty that the Applicant addresses in the present invention is to do with the delicate nature of the various components that comprise each nozzle arrangement of the printhead chip. In the above referenced matters, the various components are often exposed as a requirement of their function. On the MEMS scale, the various components are well suited for their particular tasks and the Applicant has found them to be suitably robust.
However, on a macroscopic scale, the various components can easily be damaged by such factors as handling and ingress of microscopic detritus. This microscopic detritus can take the form of paper dust.
It is therefore desirable that a means be provided whereby the components are protected. Applicant has found, however, that it is difficult to fabricate a suitable covering for the components while still achieving a transfer of force to an ink-ejecting component and efficient sealing of a nozzle chamber.
The Applicant has conceived this invention in order to address these difficulties.
SUMMARY OF THE INVENTION
According to a first aspect of the invention, there is provides a micro-electromechanical assembly that comprises
a substrate that incorporates drive circuitry;
a micro-electromechanical device that is positioned on the substrate and is electrically connected to the drive circuitry to be driven by electrical signals generated by the drive circuitry; and
a covering formation that is positioned on the substrate and is configured to enclose the micro-electromechanical device.
The covering formation may include sidewalls that extend from the substrate and a roof wall that spans the substrate.
The micro-electromechanical device may include an elongate actuator that has a fixed end that is connected to the substrate so that the actuator can receive an electrical signal from the drive circuitry and a movable end, the actuator being configured so that the movable end is displaced relative to the substrate on receipt of the electrical signal.
A motion-transmitting structure may be fast with the movable end of the actuator. The motion-transmitting structure may be connected to a working member so that movement of the actuator is translated to the working member. The motion-transmitting structure may define part of the roof wall and may be spaced from a remaining part of the roof wall to allow for movement of the motion-transmitting structure.
The roof wall may define a cover that spans the walls to cover the elongate actuator. The motion-transmitting structure may be shaped so that the cover and the motion-transmitting structure define generally co-planar surfaces that are spaced from, and generally parallel to the substrate. An opening may be defined between the cover and the motion-transmitting surface to facilitate relative displacement of the cover and the motion-transmitting surface.
The actuator may include at least one elongate actuator arm of a conductive material that is capable of thermal expansion to perform work. The actuator arm may have an active portion that defines a heating circuit that is connected to the drive circuitry layer to be resistively heated on receipt of the electrical signal from the drive circuitry layer and subsequently cooled on termination of the signal, and a passive portion which is insulated from the drive circuitry layer, the active and passive portions being positioned with respect to each other so that the arm experiences differential thermal expansion and contraction reciprocally to displace the movable end of the actuator.
The motion-transmitting structure may define a lever mechanism and may have a fulcrum formation that is fast with the substrate and pivotal with respect to the substrate and a lever arm formation mounted on the fulcrum formation. An effort formation may be connected between the movable end of the actuator and the lever arm formation and a load formation may be connected between the lever arm formation and the working member.
The lever arm formation, the cover and the walls may define a unitary structure with the lever arm formation being connected to the walls with a pair of opposed torsion formations that are configured to twist as the lever formation is displaced.
The sidewalls may include nozzle chamber walls, the roof wall defining a nozzle chamber together with the nozzle chamber walls and the motion-transmitting structure. The roof wall may define an ejection port in fluid communication with the nozzle chamber, the working member being in the form of a fluid ejection device that is positioned in the nozzle chamber, such that displacement of the working member results in ejection of fluid in the nozzle chamber from the ejection port. The substrate may define a fluid inlet channel in fluid communication with the nozzle chamber to supply the nozzle chamber with fluid.
According to a second aspect of the invention, there is provided a printhead chip for an inkjet printhead, the printhead chip comprising
a substrate; and
a plurality of nozzle arrangements that is positioned on the substrate, each nozzle arrangement comprising
nozzle chamber walls and a roof that define a nozzle chamber with the roof defining an ink ejection port in fluid communication with the nozzle chamber;
an ink-ejecting

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