Incremental printing of symbolic information – Ink jet – Ejector mechanism
Reexamination Certificate
2002-04-18
2004-04-06
Adams, Russell (Department: 2861)
Incremental printing of symbolic information
Ink jet
Ejector mechanism
Reexamination Certificate
active
06715860
ABSTRACT:
FIELD OF THE INVENTION
The present invention relates to an ink-jet head and the preparation method thereof, and further to a coating layer and the preparation method thereof. In particular, the present invention relates to an ink-jet head covered with a coating layer comprising poly-p-xylylene or a derivative of poly-p-xylylene to protect an electrode provided on an ink channel of the ink-jet head or an adhesive employed to make the ink-jet head, and the preparation method of the coating layer. The present invention also relates to a coating layer comprising poly-p-xylylene or a derivative of poly-p-xylylene, and the formation thereof. Hereafter, a coating layer comprising poly-p-xylylene or a derivative of poly-p-xylylene called as a parylene layer.
BACKGROUND OF THE INVENTION
In some of electronic parts (or components) such as various semiconductor elements and devices such as ink-jet heads, which employ various materials such as metals, ceramics, and plastics, as a substrate body or substrate materials having said various materials on the surface, a protective layer, which comprises organic materials, is frequently provided on said substrate body for the purpose of enhancing electrical insulation, moisture resistance, and abrasion resistance Further, in order to minimize elution of components of adhesives from joined parts which are adhered employing said adhesives, a protective layer, which comprises organic materials, is occasionally formed in the same manner. Of such protective layers, a parylene layer, which is formed employing a gas phase synthetic method, is preferably employed, since it exhibits high insulating properties as well as high moisture resistance. However, due to the fact that said parylene layer exhibits low adhesion to a substrate body, Japanese Patent Publication No. 58-56371 describes enhancement of adhesion to a substrate body by forming a parylene layer after said substrate body is subjected to a pre-treatment employing a coupling agent.
SUMMARY OF THE INVENTION
The method described in Japanese Examined Patent Publication No. Tokkosho 58-56371 assures improved adhesion of said parylene layer to a substrate body, compared to conventional methods. However, the resultant adhesion is found to be insufficient. As a result, problems have occasionally occurred in which said layer is peeled off during the production process. In addition, problems with durability of products have occurred in which products result in layer peeling under product-using circumstances. Specifically, said problems are pronounced when a substrate body comprises an electrode comprised of metal. Further, said problems become serious in ink-jet heads in which a PZT substrate is employed as a piezoelectric substrate, and said electrode is provided on said PZT substrate. As a result, the resultant product yield has been adversely affected by said peeling. In such ink-jet heads, it is assumed that the formation of the parylene layer in the interior of the minute ink channels is one of factors of the low production yield.
From the viewpoint of the foregoing, the present invention was achieved. An object of the present invention is to provide a parylene layer which exhibits excellent adhesion to a substrate body as well as excellent durability, a parylene layer forming method capable of preparing such a parylene layer, and an ink-jet head prepared employing said parylene layer or a parylene layer which is formed employing said parylene layer forming method.
Another object of the present invention is to provide a parylene layer which exhibits excellent insulating properties as well as excellent heat resistance, a parylene forming method capable of preparing such a parylene layer, and an ink-jet head prepared employing said parylene layer or a parylene layer which is formed employing said parylene layer forming method.
Still another object of the present invention is to provide a parylene layer which results in an increase in yield without forming pinholes even though said layer is relatively thin, a parylene forming method capable of preparing such a parylene layer, and an ink-jet head prepared employing said parylene layer or a parylene layer which is formed employing said parylene layer forming method.
A further object of the present invention is to provide a parylene layer which can be prepared easily and at low cost, a parylene forming method capable of preparing such a parylene layer, and an ink-jet head prepared employing said parylene layer or a parylene layer which is formed employing said parylene layer forming method.
In order to achieve at least one of the aforesaid objects, the present invention was constituted as described below.
(1) An ink-jet head comprising:
(a) a substrate forming an ink channel having an electrode provided on an inner surface of the ink channel; and
(b) a coating layer covering the electrode, wherein the coating layer comprises poly-p-xylylene or a derivative of poly-p-xylylene admixed with a silane coupling agent.
(2) A process for forming an ink-jet head, comprising the steps of:
(a) providing an electrode on a surface of a substrate which forms an ink channel;
(b) placing the substrate provided with the electrode in a deposition chamber; and
(c) contacting the substrate with a vaporous poly-p-xylylene precursor or a vaporous poly-p-xylylene derivative precursor admixed with a vaporous silane coupling agent to form a coating layer onto the surface of the substrate.
(3) A process for forming an ink-jet head, comprising the steps of:
(a) providing an electrode on a surface of a substrate which forms an ink channel;
(b) placing the substrate provided with the electrode in a deposition chamber; and
(c) contacting the substrate with a vaporous poly-p-xylylene precursor or a vaporous poly-p-xylylene derivative precursor admixed with a vaporous silane coupling agent to form a coating layer onto the surface of the substrate, wherein at least a part of the silane coupling agent remains unvaporized in the deposition chamber during the step (c).
(4) An ink-jet head having an ink channel comprising a piezoelectric substrate provided with an electrode on an inner surface of the ink channel, wherein an ink droplet is jetted from the ink channel by deforming the piezoelectric substrate in accordance with an applied electric field, the ink-jet head comprising covering the electrode, wherein the coating layer comprises poly-p-xylylene or a derivative of poly-p-xylylene admixed with a silane coupling agent.
(5) A process for forming an ink-jet head jetting an ink droplet from the ink channel by deforming a piezoelectric substrate in accordance with an applied electric field, comprising the steps of:
(a) providing an electrode on a surface of the piezoelectric substrate which forms an ink channel;
(b) placing the piezoelectric substrate provided with the electrode in a deposition chamber; and
(c) contacting the piezoelectric substrate with a vaporous poly-p-xylylene precursor or a vaporous poly-p-xylylene derivative precursor in the presence of a vaporous silane coupling agent to form a coating layer onto the surface of the piezoelectric substrate.
(6) A process for forming an ink-jet head jetting an ink droplet from the ink channel by deforming a piezoelectric substrate in accordance with an applied electric field, comprising the steps of:
(a) providing an electrode on a surface of the piezoelectric substrate which forms an ink channel;
(b) placing the piezoelectric substrate provided with the electrode in a deposition chamber; and
(c) contacting the piezoelectric substrate with a vaporous poly-p-xylylene precursor or a vaporous poly-p-xylylene derivative precursor admixed with a vaporous silane coupling agent to form a coating layer onto the surface of the substrate, wherein at least a part of the silane coupling agent remains unvaporized in the deposition chamber during the step (c).
(7) An article comprising:
(a) a substrate; and
(b) a coating layer on the substrate, wherein the coating layer comprises poly-p-xylylene or a derivative of poly-p-xylylene admixed with a s
Adams Russell
Do An H.
Frishauf Holtz Goodman & Chick P.C.
Konica Corporation
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