Method of making ESD protection device

Details Method of making ESD protection device Method of making ESD protection device

1995-06-07

1996-04-16

Chaudhari, Chandra

Fishing, trapping, and vermin destroying

437 33, 437918, H01L 21761

Patent

active

055082246

ABSTRACT:
An ESD protection device is disclosed having a first region of a first conductivity type. A second region, which is heavily doped, of a second conductivity type is disposed in the first region. The second region extends from the surface of the first region a first depth. A third region, which is heavily doped, of the second conductivity type, is also disposed in the first region such that the third region is separated from the second region by a portion of the surface of the first region. The third region extends from the surface of the first region a second depth less than the first depth of the second region. An insulating region is grown on a portion of the surface of the first region between the second and third regions. Furthermore, a resistive conducting region is disposed on the second region and the insulating region. A portion of the resistive conducting region extends beyond the second region for receiving an input signal.

REFERENCES:
patent: 4139935 (1979-02-01), Bertin et al.
patent: 5290724 (1994-03-01), Leach
patent: 5366908 (1994-11-01), Pelella

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