Dynamic magnetic information storage or retrieval – Head – Core
Reexamination Certificate
2001-06-18
2004-05-25
Klimowicz, William (Department: 2652)
Dynamic magnetic information storage or retrieval
Head
Core
C029S603150
Reexamination Certificate
active
06741422
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates generally to the fabrication of magnetic heads for hard disk drives, and more particularly to the fabrication of a narrow P
2
pole tip and a fine pitch induction coil using a single image transfer step.
2. Description of the Prior Art
Efforts to increase the performance characteristics of hard disk drives have focused on increasing the areal data storage density of the magnetic hard disks and increasing the data writing rate of magnetic heads in writing data to the hard disks. As will be understood from reading this detailed description, the present invention advantageously affects both of these hard disk performance characteristics.
One way to increase the areal data storage density is to decrease the width of the data tracks upon the hard disk media. Narrower data tracks allow for more tracks per inch (TPI) to be written on a disk, thereby increasing the areal data storage density of the disk. The well recognized method for decreasing the width of the data tracks is to decrease the width of the P
2
pole tip of the magnetic head, because the width of the P
2
pole tip generally determines the width of the data track that is written by the magnetic head. Prior art photolithographic techniques for fabricating P
2
pole tips are currently reaching the limits of process accuracy, in that it is difficult to accurately and reliably fabricate high aspect ratio P
2
pole tip trenches utilizing photolithographic techniques. Recently, high aspect ratio P
2
pole tip trenches have been fabricated utilizing reactive ion etch (RIE) techniques, which have produced good results where the P
2
pole tip is subsequently electroplated into the RIE created trench. The present invention is an improvement in the RIE P
2
pole tip fabrication process for the fabrication of magnetic heads, as is discussed in detail below.
To improve the magnetic head data writing rate, prior art magnetic heads have been fabricated with higher aspect ratio induction coils. Such high aspect ratio induction coils allow for the individual induction coil turns to be spaced closer together, creating a fine pitch induction coil. Where a fine pitch induction coil is fabricated, the P
2
pole yoke can be shortened, thus creating a similarly shortened magnetic flux circuit through the P
1
and P
2
poles, such that the data writing rate of the magnetic head is increased.
The present invention advantageously utilizes one dielectric layer, one RIE mask and image transfer step, and one RIE step to create both a narrow, high aspect ratio P
2
pole tip and a high aspect ratio, fine pitch induction coil. In so doing, fabrication problems associated with separate RIE processes for creating a P
2
pole tip and for creating a fine pitch induction coil are avoided, and the fabrication of an improved magnetic head is simplified.
SUMMARY OF THE INVENTION
The magnetic head of the present invention includes a narrow, high aspect ratio P
2
pole tip and a high aspect ratio, fine pitch induction coil. Electroplating trenches for the P
2
pole tip and the induction coil are fabricated in a single RIE process step, and the P
2
pole tip and the induction coil are thereafter separately plated up into their respective trenches to complete the fabrication of these structures.
Briefly, following the fabrication of a P
1
pole and the deposition of an insulation layer thereon, a patterned P
2
pole tip seed layer is deposited. Significantly, the pole tip seed layer is not deposited beneath the induction coil area of the magnetic head. A dielectric layer is next deposited and a patterned RIE etching mask is fabricated upon the dielectric layer. The etching mask pattern includes both a P
2
pole tip trench opening and an induction coil trench opening. Thereafter, in a single RIE etching step, the P
2
pole tip trench is etched through the dielectric material down to the seed layer, and the induction coil trench is etched through the dielectric material down to the insulation layer. The P
2
pole tip is then electroplated up into its trench, and no electroplating occurs within the induction coil trench because no seed layer has been yet deposited therein. Following the electroplating of the P
2
pole tip, an induction coil seed layer is deposited upon the wafer surface and specifically down into the induction coil trench. Thereafter, the induction coil is electroplated up into the induction coil trench. A chemical mechanical polishing (CMP) step is next conducted to remove the excess induction coil material and the RIE etching mask. Thereafter, a patterned insulation layer is deposited upon the induction coil, which is followed by the fabrication of a P
2
pole yoke thereupon. Further fabrication steps as are known to those skilled in the art are thereafter accomplished to complete the magnetic head of the present invention.
It is an advantage of the magnetic head of the present invention that it includes a narrow, high aspect ratio P
2
pole tip and a high aspect ratio, fine pitch induction coil.
It is another advantage of the magnetic head of the present invention that the P
2
pole tip and the induction coil are fabricated utilizing a single RIE etching mask.
It is a further advantage of the magnetic head of the present invention that it includes a narrow, high aspect ratio P
2
pole tip and a high aspect ratio, fine pitch induction coil that are fabricated in a single dielectric layer.
It is an advantage of the hard disk drive of the present invention that it has an increased areal data storage density and an increased data writing rate.
It is another advantage of the hard disk drive of the present invention that it includes a magnetic head of the present invention having a narrow, high aspect ratio P
2
pole tip and a high aspect ratio, fine pitch induction coil.
It is another advantage of the hard disk drive of the present invention that it includes a magnetic head of the present invention wherein the P
2
pole tip and the induction coil are fabricated utilizing a single RIE etching mask.
It is a further advantage of the hard disk drive of the present invention that it includes a magnetic head of the present invention that includes a narrow, high aspect ratio P
2
pole tip and a high aspect ratio, fine pitch induction coil that are fabricated in a single dielectric layer.
It is an advantage of the fabrication method of the present invention that a narrow, high aspect ratio P
2
pole tip and a high aspect ratio, fine pitch induction coil are fabricated within a single dielectric material layer.
It is another advantage of the method for fabricating a magnetic head of the present invention that the P
2
pole tip trench and the induction coil trench are fabricated in a single RIE etching step.
These and other features and advantages of the present invention will no doubt become apparent to those skilled in the art upon reading the following detailed description which makes reference to the several figures of the drawings.
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Emilio Santini Hugo Alberto
Hsiao Richard
Guillot Robert O.
Hitachi Global Storage Technologies - Netherlands B.V.
IPLO -Intellectual Property Law Offices
Klimowicz William
LandOfFree
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