Sputter-coating of glass sheets or other substrates

Details Sputter-coating of glass sheets or other substrates Sputter-coating of glass sheets or other substrates

1975-12-03

1977-02-22

Skapars, Anthony

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

204298, C23C 1500

Patent

active

040090906

ABSTRACT:
A cathode for use in the sputter-coating of thin films of a selected coating material on glass sheets and other substrates, and means for cooling the same. The cathode is of rectangular construction including a top wall, a bottom wall and side and end walls defining a closed chamber therein. The cathode is internally cooled by circulating a cooling medium, such as oil, under a constant head pressure, through a closed system in which the cathode is interposed, and means for continuously withdrawing air and any other gases from the system such that as the oil circulates through the cathode chamber it will exert a pressure, less than atmospheric pressure, upon the walls of said cathode and thereby reduce the pressure differential across the cathode walls.

REFERENCES:
patent: 3890217 (1975-06-01), Burrows et al.
patent: 3904506 (1975-09-01), Carmichael et al.
patent: 3916523 (1975-11-01), Lane et al.
patent: 3945911 (1976-03-01), McKelvey

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