Methods of making mechanisms in which relative locations of...

Optical: systems and elements – Optical modulator – Light wave temporal modulation

Reexamination Certificate

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C359S291000, C359S295000, C359S298000, C359S224200

Reexamination Certificate

active

06678084

ABSTRACT:

BACKGROUND OF THE INVENTION
1. Field of the Invention
This invention relates to methods of making mechanisms, in which the precise relative locations of elements are maintained during manufacturing. The methods according to the present invention can be used to make a variety of devices where relative positioning of device elements is maintained during manufacturing. Examples include tunable optical elements, such as mirrors, lenses, filters, prisms and diffraction gratings for use in tunable optical devices.
2. Background of the Related Art
There is a continuing need for precise positioning of optical elements in devices for various applications, such as optical systems, including imaging systems and telecommunications networks. Such precise positioning offers benefits such as tunable devices and simplified packaging.
Existing technologies for forming mechanisms for positioning devices are too costly, unreliable, and/or do not exhibit the performance needed for present and/or future systems requirements.
SUMMARY OF THE INVENTION
An object of the invention is to solve at least the above problems and/or disadvantages and to provide at least the advantages described hereinafter.
The present invention provides methods of fabricating mechanisms that can be used to make a variety of positioning devices that are more reliable, more cost effective and/or exhibit better performance than prior fabrication methods.
Additional advantages, objects, and features of the invention will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the invention. The objects and advantages of the invention may be realized and attained as particularly pointed out in the appended claims.


REFERENCES:
patent: 4203128 (1980-05-01), Guckel et al.
patent: 4400058 (1983-08-01), Durand et al.
patent: 4553816 (1985-11-01), Durand et al.
patent: 4566935 (1986-01-01), Hornbeck
patent: 4825262 (1989-04-01), Mallinson
patent: 4859060 (1989-08-01), Katagiri et al.
patent: 5068861 (1991-11-01), Abbott et al.
patent: 5313333 (1994-05-01), O'Brien et al.
patent: 5381232 (1995-01-01), van Wijk
patent: 5383168 (1995-01-01), O'Brien et al.
patent: 5461507 (1995-10-01), Westland et al.
patent: 5510914 (1996-04-01), Liu et al.
patent: 5561523 (1996-10-01), Blomberg et al.
patent: 5822110 (1998-10-01), Dabbaj
patent: 5917647 (1999-06-01), Yoon
patent: 5970190 (1999-10-01), Fu et al.
patent: 6078395 (2000-06-01), Jourdain et al.
patent: 6137819 (2000-10-01), Najda
patent: 6324192 (2001-11-01), Tayebati
patent: 6335817 (2002-01-01), Phillipps
patent: 6400738 (2002-06-01), Tucker et al.
patent: 6433917 (2002-08-01), Mei et al.
patent: 2003/0011866 (2003-01-01), Little et al.
patent: 0 702 205 (1995-08-01), None
patent: WO 99/34484 (1999-07-01), None
Joost C. Lotters et al.; “Polydimethylisiloxane as an elastic material applied in a capacitive accelerometer”; (1996); J. Micromech. Microeng. 6 (1996) pp. 52-54.
P. Bley; “Polymers—an Excellent and Increasingly Used Material for Microsystems”; Sep. 1999; SPIE vol. 3876; pp. 172-184.
Thorbjorn Ebeforst et al.; “New small radius joints based on thermal shrinkage of polyimide in V-grooves for robust self-assembly 3D microstructures”; J. Micromech. Microeng. 8 (1998); pp. 188-194.
M Pedersent et al.; “A capacitive differential pressure sensor with polyimide diaphragm”; J. Micromech. Microeng. 7 (1997); pp. 250-252.
Frank Niklaus et al.; “Low-temperature full wafer adhesive bonding”; J. Micromech. Microeng. 11 (2001); pp. 100-107.
Kenji Suzuki et al.; “Insect-Model Based Microrobot with Elastic Hinges”; Journal of Microelectromechanical Systems, vol. 3, No. 1, Mar. 1994; pp. 4-9.
K. Minami et al.; “Fabrication of Distributed Electrostatic Micro Actuator (DEMA)”; Journal of Microelectromechanical Systems, vol. 2, No. 3, Sep. 1993; pp. 121-127.
Cheol-Hyun Hang et al.; “Parylene-Diaphragm Piezoelectric Acoustic Transducers”; The Thirteenth Annual International Conference on Microelectromechanical Systems; (2000), pp. 148-152.
Krzysztof A R B Pietraszewski et al.; “Cryogenic servo-stabilised Fabry-Perot Interferometer for imaging at 2-2.5microns”; SPIE Proceedings, vol. 2814 (1996); pp. 139-146.
T R Hicks et al.; “The application of capacitance micrometry to the control of Fabry-Perot etalons”; J. Phys. E. Instrum., vol. 17, 1984, pp. 49-55.
P. Tayebati et al.; “Widely Tunable Fabry-Perot filter Using Ga(Al)As-AlOxDeformable Mirrors”; IEEE Photonics Technology Letters, vol. 10, No. 3, Mar. 1998; pp. 394-396.
P. Tayebati et al.; “Microelectromechanical tunable filters with 0.47nm linewidth and 70nm tuning range”; Electronics Letters; Jan. 8, 1998; vol. 34, No. 1; pp. 76-78.
M.C. Larson et al.; “Vertical Coupled-Cavity Microinterferometer on GaAs with Deformable-Membrane Top Mirror”; IEEE Photonics Technology Letters, vol. 7, No. 4, Apr. 1995; pp. 382-384.
K. Aratani et al.; “Process and Design Considerations for Surface Micromachined Beams for a Tunable Interferometer Array in Silicon”; Proc. IEEE Micro Electro Mechanical Systems, Ft. Lauderdal, FL, 1993, pp. 230-235.
MEM-TUNE Tunable Filter; Preliminary Data Sheet; May 2000.
OPM-1 Optical Performance Monitor; Preliminary Data Sheet; May 2000.
GTM-1 EDFA Gain-Tilt Monitor; Preliminary Data Sheet; May 2000.
J. H. Jerman et al.; “Miniature Fabry-Perot Interferometers Micromachined in Silicon for use in Optical Fiber WDM Systems”; Transducers '91, International Solid-State Conference on Sensors and Actuators, pp. 372-375 (1991) IEEE, pp. 472-475.
P. Tayebati; “Microelectromechanical tunable filter with stable haft symmetric cavity”; Electronics Letters—IEEE, 1998, p. 1967.
E. Ollier et al.; “Micro-Opto-Electro-Mechanical Systems: Recent developments and LETI's acitivities”; SPIE; vol. 4075; pp. 12-21. Sep. 2000.
T. R. Hicks et al.; “The application of capacitance micrometry to the control of Fabry-Perot etalons”; J. Phys. E: Sci. Instrum., vol. 17, 1984; pp. 49-55.

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