Single diaphragm transducer with multiple sensing elements

Measuring and testing – Fluid pressure gauge – Diaphragm

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73708, 73721, 338 4, 338 42, G01L 708, G01L 906

Patent

active

051845156

ABSTRACT:
A transducer having a plurality of sensing elements disposed in a single diaphragm wherein each of the sensing elements is spaced from every other of the sensing elements a predetermined distance so as to control interference among the sensing elements. Each of the sensing elements preferably comprises a plurality of piezoresistors each of which are coupled in a Wheatstone bridge configuration. This transducer achieves sensitive, accurate, high spatial resolution measurements of non-uniform pressures.

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