Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Passive components in ics
Patent
1996-07-24
1999-08-17
Munson, Gene M.
Active solid-state devices (e.g., transistors, solid-state diode
Integrated circuit structure with electrically isolated...
Passive components in ics
257307, H01L 2704
Patent
active
059397667
ABSTRACT:
A capacitor is provided for analog applications which can be fabricated with processes conventionally employed to fabricate digital circuitry and which has line spacing that is smaller than interlayer spacing. The capacitor of the present invention is based on intralayer capacitive coupling, rather than interlayer capacitive coupling which is conventionally employed in prior art capacitors. A capacitance can be achieved with the capacitor of the present invention that is higher than can be obtained with conventional capacitors occupying an area on the integrated circuit structure having similar size. Additionally, the capacitor of the present invention can be formed from upper metal layer such as metal-3, metal-4, and metal-5, and when the capacitor is formed from any of the upper metal layers the parasitic capacitance to ground is small.
REFERENCES:
patent: 5208725 (1993-05-01), Akcasu
patent: 5459633 (1995-10-01), Kosslowski et al.
patent: 5583359 (1996-12-01), Ng et al.
patent: 5589709 (1996-12-01), Dobkin et al.
Greenlaw David C.
Stolmeijer Andre
Advanced Micro Devices , Inc.
Munson Gene M.
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