Electricity: electrical systems and devices – Electrostatic capacitors – Variable
Patent
1994-11-14
1996-01-16
Ledynh, Bot L.
Electricity: electrical systems and devices
Electrostatic capacitors
Variable
3612834, 73718, 73724, H01G 700, G01L 912
Patent
active
054853451
ABSTRACT:
A monolithic capacitive differential pressure transducer (10, 44,) is shown composed of ceramic material having first and second cavities formed adjacent to opposed face surfaces to form first and second flexible diaphragms (12, 14; 50, 52) and a motion transfer pin (24, 58) attached to and extending between the diaphragms. Capacitor plates are disposed on a surface of at least one flexible diaphragm and a stationary member to form a capacitive gap. Component parts are first pressed from ceramic powder and assembled into a unit using one of several methods including relatively high pressure to press them together or using a combination of low pressure along with raising the temperature of the material to soften the binder in the ceramic material at surfaces of the parts which are to be joined together. Selected gaps, both along the x-y direction and along the z direction may be obtained, particularly in assembling the parts using high pressure using consumable spacer material which is sublimated in a debinderization cycle prior to sintering of the unit to form a monolithic body.
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Bishop Robert P.
Kawate Keith W.
Lukasiewicz Stanley J.
Southworth Robert O.
Baumann Russell E.
Donaldson Richard L.
Grossman Rene E.
Ledynh Bot L.
Texas Instruments Incorporated
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