Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Patent
1995-06-02
1999-08-17
Warden, Jill
Cleaning and liquid contact with solids
Processes
Including application of electrical radiant or wave energy...
1566431, 156345, 156345V, 216 67, 216 72, C23F 100
Patent
active
059388544
ABSTRACT:
The surface of a workpiece is cleaned by generating a steady-state one atmosphere glow discharge plasma above the surface of the workpiece. The use of one atmosphere, uniform glow discharge plasmas generated by a low frequency RF ion trapping mechanisms is preferred. The plasma used to effect surface cleaning may be formed in atmospheric air or other gases at about one atmosphere of pressure, or at pressures below or above one atmosphere.
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Carrillo S.
The University of Tennessee Research Corporation
Warden Jill
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