Motor control circuit for a wire bonding apparatus

Details Motor control circuit for a wire bonding apparatus Motor control circuit for a wire bonding apparatus

1993-07-30

1996-01-16

Ip, Paul

Electricity: motive power systems

Plural, diverse or diversely controlled electric motors

318254, 219 6916, 219 6915, 228102, H01L 2160

Patent

active

054850630

ABSTRACT:
A motor control circuit for a wire bonding apparatus for manufacturing semiconductor devices, etc. using a feedback gain circuit which performs feedback control of a synthesized signal that drives a Z-axis motor for moving a capillary up and down. The gain value of the feedback gain circuit is controlled by a computer, thus allowing smooth and stable control of the motor operation even after rotational speed change of the Z-axis motor, and assuring a stable wire bonding.

REFERENCES:
patent: 4150275 (1979-04-01), Wavre
patent: 4817848 (1989-04-01), Gabaldon
patent: 5158223 (1992-10-01), Shimizu
patent: 5238174 (1993-08-01), Ricketson et al.
patent: 5251805 (1993-10-01), Tani et al.
patent: 5293217 (1994-03-01), Sugawara
patent: 5307978 (1994-05-01), Ricketson et al.
patent: 5310982 (1994-05-01), Chang et al.
patent: 5316204 (1994-05-01), Takehashi et al.
patent: 5317242 (1994-05-01), Kashima et al.

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