Apparatus for vacuum deposition of sublimative substance

Details Apparatus for vacuum deposition of sublimative substance Apparatus for vacuum deposition of sublimative substance

1991-12-31

1993-12-21

Leung, Philip H.

Electric heating

Metal heating

Of cylinders

219 1067, 219 1079, 118724, 118726, H05B 610

Patent

active

052722988

ABSTRACT:
A vacuum deposition apparatus has a slit-like nozzle formed in a receptacle accommodating a vacuum deposition material to effect uniform vacuum deposition of the material in the direction of width of a moving base material. The receptacle is made of graphite. An inductively heated body is disposed at the upper part of the receptacle and is provided with the small slit-like nozzle. The nozzle extends in the direction of width of the moving base material. The vaporized vacuum deposition material passes through the nozzle and is deposited uniformly in the direction of width of the moving base material.

REFERENCES:
patent: 2743306 (1956-04-01), Mark, Jr.
patent: 2875556 (1959-03-01), Vigna et al.
patent: 3361864 (1968-01-01), Vollmer et al.
patent: 3446936 (1969-05-01), Hanson et al.
patent: 4550412 (1985-10-01), Holcombe et al.
patent: 5134261 (1992-07-01), Larkin et al.
RCA Technical Notes, vol. 19, No. 723, Jun. 1, 1967, P. Goldstein, "Apparatus for Evaporating Sublimable Materials".

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