Method for producing diamond films

Details Method for producing diamond films Method for producing diamond films

1992-10-29

1994-01-04

Kunemund, Robert

Chemistry of inorganic compounds

Carbon or compound thereof

Elemental carbon

156DIG68, 427571, 427517, B01J 306, B23P 500

Patent

active

052757986

ABSTRACT:
Disclosed is a method for the production of diamond films, which comprise introducing a diamond-forming gas into a reaction chamber in which a substrate is located, activating the gas in the reaction chamber and depositing diamond on the substrate by decomposition of the gas, wherein the diamond-forming gas is a gas or gas mixture containing hydrogen, oxygen and carbon atoms at an atomic ratio satisfying requirements represented by the following formulae:

REFERENCES:
patent: 3749760 (1973-07-01), Deryagin
patent: 3961103 (1976-06-01), Aisenberg
patent: 4434188 (1984-02-01), Kamo et al.
patent: 4816286 (1989-03-01), Hirose

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