Apparatus and method of aligning notches using a free-floating r

Details Apparatus and method of aligning notches using a free-floating r Apparatus and method of aligning notches using a free-floating r

1996-08-26

1997-09-02

Merritt, Karen B.

Material or article handling

Article reorienting device

Article frictionally engaged and rotated by relatively...

198394, 414936, 414938, 414786, B65G 4724

Patent

active

056624522

ABSTRACT:
An apparatus and method for aligning indexing notches of disk-shaped members, such as semiconductor wafers, include providing an alignment rod that is driven by another roller to cause rotation of the disk-shaped members. The circumferential surfaces of the alignment rod and the drive roller are in frictional contact. Initially, the disk-shaped members rest upon the alignment rod, so that rotation of the alignment rod causes rotation of the disk-shaped members until indexing notches are seated on the alignment rod. In the preferred embodiment, the seating of the indexing notches transfers at least a portion of the weight of the disk-shaped members to a reciprocating structure, such as a comb member. After all of the indexing notches have been aligned, a second weight transfer occurs, with the reciprocating structure following the contour of the drive roller and the disk-shaped members coming to rest on the drive roller. The disk-shaped members can then be uniformly rotated to locate the notches as desired. In the preferred embodiment, the alignment rod is a free-floating nylon member.

REFERENCES:
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patent: 4441853 (1984-04-01), Kosugi
patent: 4662811 (1987-05-01), Hayden
patent: 5183378 (1993-02-01), Asano et al.
patent: 5551829 (1996-09-01), Jerolimov et al.
V.J. Delgado, "Semiconductor Wafer Alignment Fixture," IBM Technical Disclosure Bulletin, vol. 10, No. 6, Nov. 1967, pp. 828-829.

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