Microelectromechanical (MEMS) switch using stepped actuation...

Details Microelectromechanical (MEMS) switch using stepped actuation... Microelectromechanical (MEMS) switch using stepped actuation...

2001-07-06

2003-03-04

Pascal, Robert (Department: 2817)

Wave transmission lines and networks

Plural channel systems

Having branched circuits

C333S105000, C333S262000

Reexamination Certificate

active

06529093

ABSTRACT:

TECHNICAL FIELD OF THE INVENTION
This invention relates to microelectromechanical system (MEMS) switches, and more particularly, to a MEMS switch using stepped actuation.
BACKGROUND OF THE INVENTION
The use of microelectromechanical (MEMS) switches has been found to be advantageous over traditional solid-state switches. For example, MEMS switches have been found to have superior power efficiency, low insertion loss, and excellent electrical isolation. However, for certain high-speed applications such as RF transmission/receiving, MEMS switches are in general too slow for many applications. This is primarily due to the speed of a MEMS switch being limited by its resonance frequency. To improve the speed of the MEMS switch, the stiffness of the MEMS structure must be increased. However, stiff structures require higher actuation voltages for the switching action to occur.
One possible solution is to simply reduce the gap between the structure and the actuation electrode. However, this is problematical because this will degrade electrical isolation.


REFERENCES:
patent: 5278368 (1994-01-01), Kasano et al.
patent: 5544001 (1996-08-01), Ichiya et al.
patent: 5619061 (1997-04-01), Goldsmith et al.
patent: 6127744 (2000-10-01), Streeter et al.
patent: 6160230 (2000-12-01), McMillan et al.
patent: 6307452 (2001-10-01), Sun

Affiliated with

Also associated with

Rating

Microelectromechanical (MEMS) switch using stepped actuation... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Microelectromechanical (MEMS) switch using stepped actuation..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Microelectromechanical (MEMS) switch using stepped actuation... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3010973