Method of manufacturing semiconductor memory element

Details Method of manufacturing semiconductor memory element Method of manufacturing semiconductor memory element

1992-08-31

1994-08-30

Fourson, George

Fishing, trapping, and vermin destroying

437 37, 437 38, 437 67, 437919, 437109, 437233, 437238, H01L 2120, H01L 2162

Patent

active

053427920

ABSTRACT:
A method of manufacturing a semiconductor memory element, comprising the steps of:

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Spielmann "Nitrogen Reactions on Silicon Wafers" IBM Technical Disclosure Bulletin, vol. 10, No. 3, Aug. 67, p. 333.

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