Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent
1979-03-09
1981-05-05
Weisstuch, Aaron
Chemistry: electrical and wave energy
Apparatus
Coating, forming or etching by sputtering
204192R, C23C 1500
Patent
active
042657296
ABSTRACT:
A magnetically enhanced sputtering device including magnet means for establishing a magnetic field where the lines of force thereof extend over and may pass through the cathode sputtering surface at one predetermined area thereof. Preferably, the majority of the lines of force passing through said predetermined area of the sputtering surface are inclined at angles of 45.degree. or less with respect to the surface. The magnet means may be disposed on the side of the cathode opposite the sputtering surface where the flux therein extends substantially parallel to the sputtering surface.
Means for shaping the magnetic field at least along the direction of the lines of force may also be provided where the field shaping means may render the lines of force more parallel to the sputtering surface to thereby enhance uniformity of erosion of the sputtering surface at least in the direction of the lines of force and/or the field shaping may cause the lines of force to be substantially perpendicular to an edge of the sputtering surface to thereby substantially limit erosion of the sputtering surface beyond the edge.
The magnet means may cause a closed loop configuration of the lines of force where the closed loop configuration has at least some non-linear portions. Preferably flexible magnetic means may be employed for enhancing the uniformity of the magnetic field along the non-linear portions.
REFERENCES:
patent: 3956093 (1976-05-01), McLeod
patent: 4046660 (1977-09-01), Fraser
patent: 4060470 (1977-11-01), Clarke
patent: 4100055 (1978-07-01), Rainey
patent: 4116806 (1978-09-01), Love et al.
patent: 4155825 (1979-05-01), Fournier
patent: 4162954 (1979-07-01), Morrison, Jr.
patent: 4194962 (1980-03-01), Chambers et al.
Baker Joseph J.
Ferguson Jr. Gerald J.
Vac-Tec Systems, Inc.
Weisstuch Aaron
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