Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1989-02-17
1991-02-26
Morgenstern, Norman
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427 38, 427249, B05D 512, C23C 1626, C23C 1650
Patent
active
049960792
ABSTRACT:
While CVD (chemical vopour reaction) methods and enhanced CVD methods for coating a substrate with a carbon coating have recently been attracting considerable interest, there have occurred hitherto rubbing-off of the carbon coating from the underlying substrate due to differential thermal expansion or contraction. The present invention discloses a modification of the conventional CVD process for carbon deposition in accordance with which the deposition condition is changed in order that the hardness of the carbon coating at the interface between the coating and the underlying substrate is lower than that at the external surface of the coating.
REFERENCES:
patent: 4698256 (1987-10-01), Giglia et al.
patent: 4770940 (1988-09-01), Ovshinsky et al.
patent: 4777090 (1988-10-01), Ovshinsky et al.
Bueker Margaret
Morgenstern Norman
Semiconductor Energy Laboratory Co,. Ltd.
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