Structure for an optical switch on a silicon substrate

Details Structure for an optical switch on a silicon substrate Structure for an optical switch on a silicon substrate

2000-09-28

2002-10-15

Lester, Evelyn A (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000, C359S298000, C359S224200, C257S415000

Reexamination Certificate

active

06466356

ABSTRACT:

BACKGROUND
For optical telecommunication systems it is often necessary to switch the path of the transmitted light. Numerous different approaches have been suggested. Optical switching based on micro-electromechanical system (MEMS) mirrors is particularly attractive for communication systems. Optical switches using reflecting MEMS mirrors are convenient because free-space light transmission is used and scaling to a large-scale optical cross-connect system is possible. This is important because of current demand for optical cross-connect systems on the order of 1000×1000. Actuation to move the MEMS mirrors in an optical cross-connect system is typically electrostatic, electromagnetic, piezoelectric or thermal.
SUMMARY
Optical cross-connect systems in accordance with an embodiment of the invention involve the general concept of a two dimensional array of MEMS tilt mirrors being used to direct light coming from a first optical fiber to a second optical fiber. Each MEMS tilt mirror in the two dimensional array can tilt about two non-colinear axes and is suspended by a plurality of suspension arms attached to a silicon substrate.


REFERENCES:
patent: 6091050 (2000-07-01), Carr
patent: 6201284 (2001-03-01), Hirata et al.
patent: 6267605 (2001-07-01), Biegelsen
patent: 6283601 (2001-09-01), Hagelin et al.
patent: 6300665 (2001-10-01), Peeters et al.
patent: 6341039 (2002-01-01), Flanders et al.
patent: 2001/0030817 (2001-10-01), Hagelin et al.
patent: 2002/0015215 (2002-02-01), Miles

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