Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1993-04-05
1995-02-14
Turner, Samuel A.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356363, 250237G, G01B 902
Patent
active
053900227
ABSTRACT:
A displacement information detection apparatus for detecting relative displacement information regarding the apparatus and an object to be detected includes an illumination system for radiating coherent light. A first diffraction grating splits the coherent light from the illumination system into first and second light beams, which are radiated onto the object. A second diffraction grating synthesizes the first and second light beams emerging from the object to generate an interference light beam. A light-receiving element detects the interference light beam and detects the relative displacement information regarding the object and the apparatus upon reception of the interference light beam. The illumination system is configured to focus the first and second light beams at a location along an optical path between the first diffraction grating and the second diffraction grating, so that the interference light beam incident on the light-receiving element is a divergent light beam.
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Ishizuka Koh
Kaneda Yasushi
Kondo Hiroshi
Nishimura Tetsuharu
Canon Kabushiki Kaisha
Kim Robert
Turner Samuel A.
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