Registers – Systems controlled by data bearing records
Patent
1993-03-26
1995-02-14
Shepperd, John
Registers
Systems controlled by data bearing records
G06F 1546
Patent
active
053897692
ABSTRACT:
An ID recognizing system for a semiconductor manufacturing system includes IC modules set in surfaces of containers which accommodate wafers and are conveyed from one device to another in the semiconductor manufacturing system. Each IC module is capable of transmitting and receiving signals from fixed stations and includes a reloadable memory. The semiconductor manufacturing system is made up of a number of devices for performing manufacturing operations on the wafers in the containers, and each of the devices include one of the fixed stations. The IC module is powered by the energy of radio waves received from the fixed station in the device in which said container has been placed for processing of the wafers therein. The radio communication is in the form of communication packets which include data on individual wafers in the cassettes so that the individual wafers can be processed separately. The position or off-set of the data within the packet indicates the position of the corresponding wafer within the container.
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Smart Traveler System, ASYST Technologies, Oct. 1987.
Hayashi Mitsuhiro
Kawano Hitoshi
Morita Teruya
Murata Masanao
Okuno Atsushi
Shepperd John
Shinko Electric Co. Ltd.
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